TY  - THES
AU  - Langhanki, Bertram
DA  - 2001
DP  - Universität Paderborn
LA  - eng
N1  - Paderborn, Univ., Diss., 2001
PB  - Universität Paderborn
PY  - 2001
T2  - Department Physik
TI  - Electron paramagnetic resonance of process induced defects in silicon
UR  - https://nbn-resolving.org/urn:nbn:de:hbz:466-20010101139
Y2  - 2026-10-09T03:45:13
ER  -