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Bibliographic Metadata
Title
A new X-ray diffractometer for the online monitoring of epitaxial processes
:
/ von Alexander Kharchenko
Author
Kharchenko, Alexander
Published
2003
Institutional Note
Paderborn, Univ., Diss., 2003
Language
English
Document Types
Dissertation (PhD)
Keywords (GND)
Röntgendiffraktometer
/
In situ
/
Verbindungshalbleiter
/
Epitaxieschicht
/
MOCVD-Verfahren
URN
urn:nbn:de:hbz:466-20030101154
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Universitätsbibliothek Paderborn
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A new X-ray diffractometer for the online monitoring of epitaxial processes
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13.76 mb
]
zusfasng
[
pdf
18.97 kb
]
abstract
[
pdf
18.19 kb
]
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Classification
Besondere Sammlungen
→
Veröffentlichungen der Universität
→
Fakultät für Naturwissenschaften
→
Department Physik
Klassifikation (DDC)
→
Naturwissenschaften und Mathematik
→
Physik
→
Physik
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