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Title
A new X-ray diffractometer for the online monitoring of epitaxial processes / von Alexander Kharchenko
AuthorKharchenko, Alexander
Published2003
Institutional NotePaderborn, Univ., Diss., 2003
LanguageEnglish
Document TypesDissertation (PhD)
Keywords (GND)Röntgendiffraktometer / In situ / Verbindungshalbleiter / Epitaxieschicht / MOCVD-Verfahren
URNurn:nbn:de:hbz:466-20030101154 
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A new X-ray diffractometer for the online monitoring of epitaxial processes [13.76 mb]zusfasng [18.97 kb]abstract [18.19 kb]
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