Bibliographic Metadata

• Title
  Low pressure chemical vapor deposition of silicon nitride and silicon oxynitride layers and their application in optical waveguide based chemical sensors / Ahmed Tamim
• Author
  Tamim, Ahmed
• Published
  2007
• Institutional Note
  Paderborn, Univ., Diss., 2007
• Language
  English
• Document Types
  Dissertation (PhD)
• URN
  urn:nbn:de:hbz:466-2007091835