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Bibliographic Metadata

  • Title
    Low pressure chemical vapor deposition of silicon nitride and silicon oxynitride layers and their application in optical waveguide based chemical sensors / Ahmed Tamim
  • Author
    Tamim, Ahmed
  • Published
    2007
  • Institutional Note
    Paderborn, Univ., Diss., 2007
  • Language
    English
  • Document Types
    Dissertation (PhD)
  • URN
    urn:nbn:de:hbz:466-2007091835 
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